| Author | Y. Naka |
| Format | Hardcover |
| ISBN | 9780412395505 |
| Publication Date | 17/05/2009 |
| Publisher | Springer |
| Manufacturer | Kluwer Academic Publishers Group |
Integrated circuits are finding wider applications through a range of industries. This title presents the design principles for devices, describes the overall VLSI process, and deals with the useful manufacturing technologies and inspection procedures.
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